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Vacuum Chamber Manufacturing
Vacuum Chamber Manufacturing
Usually complex vacuum chambers require customization. With our vacuum chamber manufacturing technology, Ferrotec (China) is able to customize the chambers according to the specific requirements from the customers.
Technological Development Route Technical Equipment Capability National patent for utility model
  • In 1993

    Trial production of Ferrofluidic Seals launched 

  • In 1995

    Production of Ferrofluidic inertia damper launched 

  • In 1997

    Production of Ferrofluidic Vacuum Feedthroughs launched 

  • In 1998

    Production of precision vacuum parts launched

  • In 2000

    Semiconductor OEM started

  • In 2002

    Participated Major national science and Engineering project- Institute of Modern Physics, Chinese Academy of Sciences 

    HIRFL-CSR project 

  • In 2005

    Mono-crystal Furnace chambers and components project launched 

  • In 2006

    Electron beam evaporator,electron beam welding technology and poly-crystal furnace chambers and parts projects,

    Sidel project in France launched

  • In 2007

    Poly-crystal Furnace chambers and components project launched 

  • In 2010

    Plasma Automatic Welding Technology launched 

  • In 2011

    6 Certifications of Utility Model Patent are acquired 

  • In 2012

    Vacuum chamber of wire-drawing furnace for optical fiber manufacturing equipment launched

  • In 2014

    Sapphire vacuum chamber obtained ASME pressure vessel qualification

  • In 2016

    Low temperature vacuum chamber for scientific research (nuclear waste transmutation system)  launched

  • In 2018

    SIC vacuum chamber, vacuum chamber and components for CIGS film equipment