Precision Quartz-杭州大和热磁

Precision Quartz

Ferrotec(China) precision quartz is made of high-quality imported raw materials through a series of advanced technology processing. Based on more than 20 years of research and development, Ferrotec can fabricate high-volume quartz products for 12”, 8” and smaller size semiconductor applications, and also has the ability to develop the next generation 18” quartz products. Besides, Ferrotec can also choose appropriate raw materials for fabrication in accordance with customers’ requirements.

Precision Quartz Category

Ferrotec (China) can produce diversified quartz products to meet customers’ needs. Relying on three key technical advantages -- precise processing technology, welding technique and surface treatment (cleaning) method, and supports from a professional team with global perspectives, Ferrotec are able to provide world-class and customer-tailored products for customers.

Quartz Tubes

Quartz tubes are mainly reaction tubes, inner tubes, outer tubes, furnace tubes, injectors and etc. They are mostly used in silicon wafer surface treatment equipments for semiconductor diffusion, oxidation, deposition and heat treatment, which have high requirements for assembling dimensions, cleanliness and sealing effects.

Quartz Boats

There are 5”, 6”, 8”, and 12” quartz boats which can be used in surface treatment equipments and wet cleaning technology. As quartz boats are directly carrying silicon wafers and mostly applied into automatic uploading and unloading processes, the dimensions and cleanliness are of vital importance.

Quartz Machining

Quartz machining products include various rings, disks and other products, which are mainly used in semiconductor wafer etching and deposition processes. So they require a high level of dimension precision, cleanliness and cosmetic appearance. Some products are not allowed to rework and must be fabricated in one time, therefore, they requirement for processing capability is also demanding .

Quartz Fixture

Quartz fixtures mainly include carries, bases and covers. They are used in semiconductor processing accessory equipments. The precision is depending on its applied process.

Quartz Cleaning

Quartz cleaning products contain quartz tanks, supports and so forth which are mostly applied in wet cleaning process. The precision is relatively low, but the requirements of appearance and cleanliness are higher.

Heat Resistance

Light Transmission

High Purity

High Chemical Stability

Ferrotec Precision Quartz

Ferrotec precision quartz has the features of heat resistance, light transmission, high purity, electrical insulation and high chemical stability. High precision fabricated quartzware is essential part for the 300mm semiconductor wafer processing. It can also meet the high requirement of low iron and copper content as well. It is an ideal material widely applied in semiconductor diffusion and etching process, optical fiber performing, LED lighting and photovoltaic industries.

Matrix diagram of applications in various fields

Display

Optical Fiber Communication

Power Electrons

EV/High-speed Train

Home/Medical Appliance

Other Industry

Semiconductor correlation

Precision Quartz

Semiconductor wafer fabrication diffusion, etching and other processes;

Semiconductor wafer wet cleaning process;

Semiconductor silicon wafer epitaxial EPI process;

LED epitaxial MOCVD；

chip technology;

Optical fibre precast rod: furnace core tube, blowtorch and supporting fastener;